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Sentence analysis
7Spans
Sentence
Span Details
リトグラフィー
lithography-> リソグラフィーnoun
は
topic markergrammar
19
nineteen; 19-> 十九numeric
世紀
century; era; age; of the century; epoch-makingnoun, no-adjective
に
direction, time, indirect object, or target markergrammar
普及
diffusion; spread; popularizationnoun, suru verb
した。
light/support verb with a noun or noun-like phrase-> するgrammar